Source: Impedans Blog

Impedans Blog Semion RFEA System & Octiv Suite 2.0 Application Note - SE17/OC11

The magnetic asymmetry effect in geometrically asymmetric RF capacitively coupled plasmas, characterized with Impedans' Octiv Suite 2.0 VI probe and Semion RFEA system.To continue reading, click here.To contact us, click here.

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Mike Hopkins

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